자기베어링이 적용된 미세홀 가공용 드릴링 스핀들 개발 (Development of Drilling Spindle for Micro-hole Machining with Magnetic Bearings)

서지정보

· 발행기관 : 한국소음진동공학회
· 수록지 정보 : 한국소음진동공학회논문집 / 27권 / 4호 / 510 ~ 517페이지
· 저자명 : 박철훈, 윤태광

초록

For special materials such as tempered glass, ceramics and silicon, micro-holes less than 1 mm in diameter are generally machined through drilling using high speed spindles, but their productivity is very low due to slow machining speed. Further, when a plurality of fine holes are machined on a large-area wafer, if the machining drill is damaged and any machining failure occurs, the entire wafer becomes defective and the cost loss becomes large. In the field, maintenance costs are very high because drills are replaced periodically to avoid these defects. Applying a magnetic bearing to the spindle for micro-hole machining eliminates friction and wear between the bearing and the rotor, eliminating the need for bearing maintenance. In addition, the control current of the magnetic bearings can monitor the drill abrasion and machining conditions to prevent unconditional drill replacement, thus reducing maintenance cost and preventing machining failure. In this paper, we designed and fabricated 80000r/min micro-hole machining spindle equipped with magnetic bearings, and presented rotational and machining test results.

영어초록

For special materials such as tempered glass, ceramics and silicon, micro-holes less than 1 mm in diameter are generally machined through drilling using high speed spindles, but their productivity is very low due to slow machining speed. Further, when a plurality of fine holes are machined on a large-area wafer, if the machining drill is damaged and any machining failure occurs, the entire wafer becomes defective and the cost loss becomes large. In the field, maintenance costs are very high because drills are replaced periodically to avoid these defects. Applying a magnetic bearing to the spindle for micro-hole machining eliminates friction and wear between the bearing and the rotor, eliminating the need for bearing maintenance. In addition, the control current of the magnetic bearings can monitor the drill abrasion and machining conditions to prevent unconditional drill replacement, thus reducing maintenance cost and preventing machining failure. In this paper, we designed and fabricated 80000r/min micro-hole machining spindle equipped with magnetic bearings, and presented rotational and machining test results.

참고자료

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