성균관대학교 고급반도체특강 Homework 4

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"성균관대학교 고급반도체특강 Homework 4"에 대한 내용입니다.

목차

(1) Explain the principle of the split C-V method to extract the effective mobility by using schematic diagram, graphs, and equations.
(2) When effective mobility is extracted from the split C-V, the inversion charge (Qinv) and effective length (Leff) are indispensable parameter. How can the Qinv and Leff be extracted from split C-V? Through the split C-V method, Qinv and Leff are also extracted. The equation of Qinv is shown below.
(3) The Y-function method is also used to extract the effective mobility. The split C-V has two advantages compared to the Y-function method. What are these two advantages? (Hint 1: The effective mobility is reconstructed using the μ0, θ1, and θ2 parameters. Hint 2: The Y-function extrapolates inversion mobility towards low field.) There are two advantages in the split C-V method. One is more simple equation of effective mobility. To obtain effective mobility by Y-function method, many equations are required such as below equations.

본문내용

(1) Explain the principle of the split C-V method to extract the effective mobility by using schematic diagram, graphs, and equations.

The mobile channel charge density measurement technique is known as the “split C-V” technique, with the capacitance measured between the gate and source-drain and between the gate and the substrate, as illustrated in below figure.

The method was originally proposed by Koomen to measure the interface trapped charge density and the substrate doping density. It was later adapted to mobility measurements. To understand the split C-V technique, consider below figure.

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